JPH0413674B2 - - Google Patents

Info

Publication number
JPH0413674B2
JPH0413674B2 JP56211567A JP21156781A JPH0413674B2 JP H0413674 B2 JPH0413674 B2 JP H0413674B2 JP 56211567 A JP56211567 A JP 56211567A JP 21156781 A JP21156781 A JP 21156781A JP H0413674 B2 JPH0413674 B2 JP H0413674B2
Authority
JP
Japan
Prior art keywords
sample
detection element
backscattered electron
backscattered
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56211567A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58115383A (ja
Inventor
Yasunobu Tanaka
Takeshi Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP56211567A priority Critical patent/JPS58115383A/ja
Publication of JPS58115383A publication Critical patent/JPS58115383A/ja
Publication of JPH0413674B2 publication Critical patent/JPH0413674B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Molecular Biology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP56211567A 1981-12-29 1981-12-29 反射電子検出器 Granted JPS58115383A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56211567A JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56211567A JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Publications (2)

Publication Number Publication Date
JPS58115383A JPS58115383A (ja) 1983-07-09
JPH0413674B2 true JPH0413674B2 (en]) 1992-03-10

Family

ID=16607917

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56211567A Granted JPS58115383A (ja) 1981-12-29 1981-12-29 反射電子検出器

Country Status (1)

Country Link
JP (1) JPS58115383A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG102573A1 (en) 2000-05-04 2004-03-26 Univ Singapore A lens for a scanning electron microscope
CN101243532B (zh) * 2005-08-18 2012-01-18 电子线技术院株式会社 用于电子柱的检测器及用于电子柱的电子检测方法
CN114646689B (zh) * 2020-12-17 2025-07-22 清华大学 二次电子探头及二次电子探测器
CN114644335B (zh) * 2020-12-17 2023-07-18 清华大学 电子黑体腔体及二次电子探测装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS478874U (en]) * 1971-02-27 1972-10-03
JPS52102891A (en) * 1976-02-25 1977-08-29 Doryokuro Kakunenryo Fluorescent substances for scintillation detectors
JPS5418269A (en) * 1977-07-11 1979-02-10 Jeol Ltd Electron beam detector
JPS553129A (en) * 1978-06-21 1980-01-10 Jeol Ltd X-ray analyzer for scanning electron microscope or the like

Also Published As

Publication number Publication date
JPS58115383A (ja) 1983-07-09

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